Smart Dust
Passive CCR comm.
MEMS/polysilicon
Active beam steering laser comm.
MEMS/optical quality polysilicon
Sensor
MEMS/bulk, surface, ...
Analog I/O, DSP, Control
COTS CMOS
Solar cell
CMOS or III-V
Thick film battery
Sol/gel V2O5
Power capacitor
Multi-layer ceramic
1-2 mm
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