Design and Analysis of a Touch Mode MEMS Capacitive Pressure Sensor for IUPC

Anil sharma and Jawar Singh
IIITDM Jabalpur


This paper presents a novel design of diaphragm based MEMS capacitive pressure sensor, which find its application in Intrauterine Pressure Cathter(IUPC) system. The proposed capacitive pressure sensor is also compared with the conventional pressure sensor.