Design and Simulation of Long-Retention Capacitorless 1T-DRAM Using Experimentally Calibrated Process and Device Simulations

Shao-Han Cheng1, Chun-Hung Wang1, Fu-Chang Hsu2, Yao-Jen Lee3, Yiming Li3
1National Yang Minlg Chiao Tung University, 2NEO Semiconductor Inc., 3National Yang Ming Chiao Tung University


Abstract

In this work, a capacitorless one-transistor dynamic random-access memory (1T-DRAM) cell is investigated using calibrated process and device simulations. The simulation framework incorporates both fabrication process modeling and electrical read/write operation analysis of the floating-body storage mechanism. By optimizing the polysilicon body thickness, the device achieves its best performance at Tpoly = 20 nm, exhibiting a sensing window of 14.48 μA/μm and a retention time of 781 ms.